Antireflection Coatings Using Nanolaminate Layers with Intermediate Refractive Index

Silvia Schwyn Thoeny^1,*, Stephan Waldner,¹ Manuel Baertschi², and Thomas Frei¹        

We revisit antireflection coating designs with intermediate refractive index using nanolaminate layers and show in design and experiment that lower average reflection and sensitivity against thickness error can be reached compared to standard two material designs.

1 Evatec AG, Hauptstrasse 1a, 9477 Truebbach, Switzerland
2 RhySearch, Werdenbergstrasse 4, 9471 Buchs, Switzerland
^*Corresponding author: Silvia.schwyn-thoenyevatecnetcom

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