Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates

 

S. Schwyn Thöny^1,*, M. Bärtschi², M.Batzer¹, M. Baselgia¹, S.Waldner¹, M.Steinecke³, H.Badorreck^3,4, A. Wienke^3,4, M.Jupé^3,4

Opt. Express 31, 15825-15835 (2023)

Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta2O5-SiO2. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.

 

¹Evatec AG, Hauptstrasse 1a, 9477 Trübbach, Switzerland 
²RhySearch, Werdenbergstrasse 4, 9471 Buchs, Switzerland 
³Laser Zentrum Hannover e.V., Optical Components Department, Holleritallee 8, 30419 Hannover, Germany 
⁴Cluster of Excellence PhoenixD (Photonics, Optics, and Engineering innovation across Disciplines), Leibniz University Hannover, Welfengarten 1A, 30167 Hannover, Germany 
 * silvia.schwyn-thoeny(at)evatecnet.com

 

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