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Praktische Kontrolle und zeitliche Überwachung von dielektrischen Beschichtungsprozessen
PRACMATIC konzentriert sich auf die Suche nach praktischen, industriellen Methoden zur Eliminierung der Partikelbildung während der Abscheidung dielektrischer Beschichtungen und auf die Entwicklung robuster, einfach zu bedienender und kosteneffizienter prozessbegleitender Diagnosewerkzeuge und Software zur Überwachung der Beschichtungsprozesse und der Partikelerzeugung.
Control and stabilization of the substrate temperature in the DIBS during the optical coating process.
As part of a research project, an active substrate holder cooling system is being developed on RhySearch's Dual Ion Beam Sputtering System (DIBS). Investigations into the temperature dependence of layer properties are currently underway.
Emerging ALD Technology for the Swiss Optics Industry
As part of an Innosuisse project, RhySearch's atomic layer deposition (ALD) technology is being used by a consortium of manufacturers representing the optical component value chain to address several challenging issues.
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